Ion Implantation Parts

Tungsten, molybdenum and alloys are ideal materials for consumable parts of ion implantation processes. It includes room, filament, curved slit, bracket, cathode, terminal station, analyzer element, insulator, spare parts.

Ion Implantation Equipment Structure

     ● Chambers (graphite, tungsten, molybdenum and alloys)

     ●  Filaments (tungsten and tungsten alloys)
     ●  Arc slits (graphite, tungsten, molybdenum and alloys)
     ●  Holders (tungsten, molybdenum and alloys)
     ●  Cathodes (tungsten, molybdenum and alloys)
     ●  End station (graphite)
     ●  Analyzer components (graphite)
     ●  Insulators (ceramics)
     ●  Spare parts (graphite, tungsten, molybdenum and alloys, ceramics, steel) 

We posses a complete machine shop capable of machining parts to any above of tungsten or molybdenum alloy parts as customer specification.  We can machine to print and accept the most common file formats including:

· - AutoCad

· - SolidWorks

· - Pro E

· - IGES

· - PDF

Contact Us

Online Form: Quote Request Form

Phone: 86-379-63277689

We manufacture spare parts of ultra-pure W, Mo, Re, and alloys for major ion implantation systems.

1.  Chambers

As the ion source is converted to plasma ions, will produce more than 2000 ℃ operating temperature, ion beam eruption, it will produce a large ion kinetic energy, the general metal will soon burn, so the need for high density of inertia Metal to maintain the direction of ion beam eruption, and increase the durability of components, tungsten and molybdenum is a mandatory material. 

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2. Cathode & Holder

As the tungsten and molybdenum materials, high temperature chemical stability, thermal deformation and long life and other advantages, so the semiconductor industry ion implantation ion source and the use of parts of the use of tungsten, molybdenum materials, including the launch of the electronic cathode shielding tube, Panel, the center of the fixed rod, the arc of the arc plate, etc., we collectively referred to as ion implantation tungsten parts and ion implantation molybdenum parts.

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3. Arc Slits

 We manufacture spare parts of ultra-pure W, Mo, Re, and alloys for major ion implantation systems. Our in-house produced materials are qualified by leading companies in the ion implantation industry, and our parts rigidly follow the industry strict customized drawing. Our team consists of highly experienced and dedicated engineers who provide our clients with consistent- quality materials and assured fabrication accuracy. Our technicians have on average 15+ years of experience with refractory materials and experienced OEM fabrication. We are proud to provide our clients with high-performance products and localized customer services while still maintaining a competitive cost structure.

 Online Form: Quote Request Form

4. Tungsten Filament

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